The Effect of Dose Rate and Implant Temperature on Transient Enhanced Diffusion
نویسندگان
چکیده
Low energy boron ion implantation without preamorphization is becoming a viable option for forming shallow p+ junctions in ultra large scale integration (ULSI) devices. Pre-amorphization is often used to reduce the random channeling tail that occurs for non-amorphized boron implants. Current et al. showed results that suggested below 2 keV boron implants K.S. JONES, J. CHEN, S. BHARATAN, J. JACKSON,* L. RUBIN,* M. PUGA-LAMBERS,† and D. VENABLES‡
منابع مشابه
Effects of thermal diffusion and chemical reaction on MHD transient free convection flow past a porous vertical plate with radiation, temperature gradient dependent heat source in slip flow regime
An analytical investigation is conducted to study the unsteady free convection heat and mass transfer flow through a non-homogeneous porous medium with variable permeability bounded by an infinite porous vertical plate in slip flow regime while taking into account the thermal radiation, chemical reaction, the Soret number, and temperature gradient dependent heat source. The flow is considered u...
متن کاملEnhanced Controlled Transdermal Delivery of Mexazolam Using Ethylene-vinyl Acetate
Repeated oral administration of mexazolam, an anti-anxiety agent, may cause adverse effects such as gastric disturbance, drowsiness, and ataxia due to transiently high blood levels. Transdermal administration would avoid the systemic side effects and gastric disorders after oral administration. We have developed a matrix using ethylene-vinyl acetate (EVA), a heat-processible and flexible mat...
متن کاملEnhanced Controlled Transdermal Delivery of Mexazolam Using Ethylene-vinyl Acetate
Repeated oral administration of mexazolam, an anti-anxiety agent, may cause adverse effects such as gastric disturbance, drowsiness, and ataxia due to transiently high blood levels. Transdermal administration would avoid the systemic side effects and gastric disorders after oral administration. We have developed a matrix using ethylene-vinyl acetate (EVA), a heat-processible and flexible mat...
متن کاملComplete suppression of boron transient-enhanced diffusion and oxidation-enhanced diffusion in silicon using localized substitutional carbon incorporation
In this letter, we show the ability, through introduction of a thin Si12x2yGexCy layer, to eliminate the enhancement of enhanced boron diffusion in silicon due to an oxidizing surface or ion implant damage. This reduction of diffusion is accomplished through a low-temperature-grown thin epitaxial Si12x2yGexCy layer which completely filters out excess interstitials introduced by oxidation or ion...
متن کاملA Rapidly Convergent Nonlinear Transfinite Element Procedure for Transient Thermoelastic Analysis of Temperature-Dependent Functionally Graded Cylinders
In the present paper, the nonlinear transfinite element procedure recently published by the author is improved by introducing an enhanced convergence criterion to significantly reduce the computational run-times. It is known that transformation techniques have been developed mainly for linear systems, only. Due to using a huge number of time steps, employing the conventional time integration me...
متن کامل